FUJI ELECTRIC JOURNAL Vol.67-No.3 (Mar/1994)

FUJI ELECTRIC JOURNAL Vol.67-No.3 (Mar/1994) Analysis and Evaluation Technology
Surface and Interface Analysis of Semiconductor Devices
Osamu Ishiwata, Kanji Tatemachi, Akiyasu Kumagai
Among surface and interface analysis technologies for power devices and ICs, this paper mainly describes high resolution configuration analysis with a transmission electron microscope and high sensibility component analysis by secondary ion mass spectrometry which are most popular, citing their applications. It includes an observation that resistance control of poly-silicon film (electrode and interconnecting material) closely relates to crystal grain size in addition to dopant concentrations, and a configuration example of gate oxide interfaces.
Microstructure Analysis of Recording Disks
Atsushi Ueda, Kiyoto Yamaguchi, Nobuyuki Takahashi
Approaches by means of microscopic configuration and magnetic domain structure observation and crystal structure analysis of the surface and inside of films are essential to realize high recording density and low noise of in magnetic disks and other recording media.
Focusing on the microstructure analysis of magnetic disks, this paper describes an evaluation method, citing examples of analyses with a transmission electron microscope (TEM) and an atomic force microscope. It also describes an observation method for magnetized states (recording bits), citing examples of observations with a Lorentz TEM and a magnetic force microscope.
Analysis of Light-Induced Degradation in Amorphous Silicon (a-Si) Films For Solar Cells
Michio Ohsawa, Toshio Hama, Shinji Fujikake
Light-induced defect creation in amorphous silicon films was studied by means of electron spin resonance. Saturation of increasing defect density in a-Si:H is caused by thermal or light-induced annealing An a-Si:H film deposited at high temperature (280℃) and high deposition rate (30nm/min) shows high stability. Not only in a-Si:H but also in a-SiC:H and a-SiO:H films, weak Si-Si bonds showing exponential tail states are converted to Si dangling bond defects by light radiation. A density of hydrogen bonded in SiH2 beyond about 3×1021atms/cm3 is supposed to increase weak Si-Si bonds.
Corrosion Control of Heat Exchangers in Electric Apparatus
Masao Saitoh
It is said among damages ruling the life of electric apparatus, corrosion amounts to the highest rate. In particular, as the work environment for electric apparatus is diversifying, product design that incorporate corrosion control technology will be an important technical field in the future from a viewpoint of quality assurance.
This paper introduces an evaluation reference for the corrosion control of heat exchangers for electric apparatus from a standpoint of work environment.
Evaluation Technology for Materials on a Metal-Base Printed-Circuit Board (PCB)
Shigemasa Saitoh, Kenji Okamoto, Takao Maeda
In power electronics products, including general-purpose inverters, metal-base PCBs with superior thermal radiation have come into wide use as high density mount PCBs to reducing size and improving functions.
In putting a metal-base PCB composed of thin insulation and metal to practical use, the reliability of insulating material is essential. This paper describes an evaluation method for copper ion migration and evaluation and analysis methods for insulating material itself and ionic residue due to contamination during board manufacturing processes which may cause copper ion migration.
Three-Dimensional Turbulent Flow Simulation of Hydraulic Turbine Runners
Yi Qian, Yoshiyuki Niikura
Numerical simulation has remarkably progressed with rapid advances in computer technology, and commands an increasingly important position in industry. Fuji Electric has so far developed flow analysis technique as an important tool for hydraulic turbine design.
This paper gives an outline of our lately developed three-dimensional turbulent flow simulation and examples of numerical analyses of Francis-,pump-, and bulb-turbine runners.
Development of a Reflection Photoelastic Analyzer and Stress Analysis of Plastic parts
Fumisato, Niino
Plastic molded parts are often used in a united structure with other materials and residual stress is apt to be induced in molding・Fuji Electric developed a reflection photoelastic analyzer to precisely grasp residual stress in the parts to produce highly reliable parts. This paper describes Fuji Electric's original developments such as an optical system to exactly measure isochromatics or isoclinics, a method of judging an isochromatics fringe order, and a method of extracting isoclinics. As an example, the result of stress analysis of the plastic support for the moving contact leaf spring in a mini relay is introduced.
Factory Microanalysis for High technology Products
Shoji Tsukada, Shigemasa Saitoh, Shigeru Nishizawa
Building optimum production lines for semiconductors and magnetic recording media indispensably requires analysis and evaluation of the surfaces and interfaces of products in each process. Therefore, Matsumoto Factory which is developing and manufacturing these products introduced the latest physical analyzers and continues with microanalysis making good use of directly linking with the production lines.
This paper describes analysis examples of actual products as well as the analysis tools.
Nondestructive Testing on Graphite Structures for High Temperature Engineering Test Reactor (HTTR)
Masahiro Ishihara, Mamoru Kambe, Nobumasa Tsuji
The application of ultrasonic (for internal defects) and eddy current testing (for surface defects) were investigated on the structures of nuclear-grade IG-110 and PGX graphite for the HTTR.
The equipment were developed in order to detect the specific configuration of graphite blocks and the testing conditions were defined as the practical testing methods.
The established testing methods are being used for the acceptance tests of graphite structures in the HTTR.
Three-Phase Induction Motors R90 Series and Recent Technical Trends of Medium-Motor Technology
Hiroshi Harie, Etsuhiro Senda, Tsutomu Nanbu
The medium induction motors R90 series have realized downsizing efficiency improvement, and reliability enhancement by adopting a new ventilation system and by widening an application range of aluminum cage rotors to meet needs for energy saving, maintenance saving and high reliability. Laying emphasis on the features of R90 series, this paper describes recent temperature, stress and vibration analysis technology, winding and aluminum casting production technology, and quality assurance technology, and also the problems and measures, such as cooling, noise and surge, on the motor side of fvariable-speed drives now growing rapidly.


Top Of This Page

Page Top