Demands for higher-grade clean rooms have intensified mainly in semiconductor manufacturing processes together with the progress of precision/ultraprecision machining technology. In addition, the introduction of clean rooms is being planned and realized in industrial fields where clean rooms have not been used so far and in biological fields.
This paper describes the present status and prospects for clean-room technology spreading over various fields and improving in quality, and also refers to the trends of recent standards and airflow/airborne-particle distribution analysis by computer simulation.

The functions of clean rooms being used in many fields have been specialized for each particular purpose.
This article describes the technical tendency of supercleanroom systems for VLSI fabrication and the comparison of three typical systems. It also refers to Fuji Electric's activities and some of its key components and systems.

Many biological clean rooms for controlling microorganisms have been introduced into the fields of chemicals, medical supplies, and foods. Recent progress in biotechnology and a boom in natural/additiveless foods are further increasing demands for cleaner workshops.
This paper describes an outline of the technology of biological clean room and some samples of actual installations as well.

Productivity has been improving gradually in manufacturing industries by Computer Integrated Manufacturing (CIM) and other means. On the other hand, conceptual design and trial manufacture for new product development have been increasing a ratio to the whole cost because of their difficulties in standardization. An effective solution for this problem wiil be to reduce the number of times and process time for trial manufacture by Computer Aided Engineering (CAE).
This article describes a CAE tool for incompressible viscous flow analysis, named BERPAX, citing its application to airflow simulation in clean rooms.

This article describes the new trend of clean draft chamber that is key hardware to reduce vast cost for clean room operation. The reduction in exhaust air quantity for draft chambers is a most effective measure to reduce operation cost. It depends on how small a quantity of air can block up vapor rising from washing tank. The methods are (1) exhaust vapor horizontally by providing a horizontal air curtain right above the washing tank, and (2) to suck in vapor by providing a suction hood surrounding right above the washing tank. The paper cited the latter-type draft chamber for chemical concentration and for a wet station.

The system was ordered by Oxbow Geothermal Corporation, USA in January, 1987.
This turbine is the largest of Fuji's geothermal turbines and its 658 mm (25.9 in) last-stage blades are in the largest class in the world. The turbine has two kinds of new designs: one is mixed-pressure counterflow-type turbine and the other is a direct-contact multi-pressure condenser.
These two features resulted in a jump in Fuji's geothermal-unit sales in these two years, and will give an advantage in future business as well.

According to the recommendation of the ICRP Pub1.30, Fuji Electric has developed a method of evaluating internal exposure of radiation-area workers as an effective dose equivalent in a specific period for the purpose of radiation management in nuclear power plants and others. This method is to evaluate a derived approximation with a personal computer.
By numerical processing with a large-capacity computer, we evaluated the applicability of this approximation method with regard to some nuclides. The result showed that sufficient accuracy for practical use could be obtained with appropriate evaluation periods, for example, about three days for the class D such as¹³⁷Cs and about three months for the class Y such as ⁶⁰Co.

Fuji Electric has put on the market five series of small-and medium-capacity ozonizers having high reliability and low energy consumption to meet various needs of rapidly spreading ozone applications. These ozonizers successfully use new-type ozone generating tubes clad with dielectric glass coating on the inner surface of outer grounding electrodes. The new tubes were previously developed for the large-capacity ozonizer series and accomplishes stable ozone generation and low-energy consumption due to improvement in cooling efficiency and discharge-gap accuracy. This paper describes the characteristics, performance, specification. and applications of these ozonizers