FUJI ELECTRIC JOURNAL March/2004 (Vol.77-No.2)
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Latest Trends of Research and Development |
Latest Trends of Research and Development
Noboru Furusho
With the expansion of globalization since 1990, the advantages of
Japanese-made products have been fading due to increased competition
in both domestic and international markets. To rectify this situation
requires that Japanese-made products be provided with overwhelming
competitive advantages. The keys to achieving this goal are the
research and development of technology by the manufacturers.
Fuji Electric Advanced Technology Co., Ltd. is focusing its efforts
on expanding fundamental businesses by launching new products,
shortening the incubation periods for new products and new business
ventures, and increasing basic research in order to establish a solid
foundation for continuous development.
Electrical Bistable Devices Using Organic Materials
Haruo Kawakami, Hisato Kato, Keisuke Yamashiro
Electrical bistable devices made from organic materials are being
developed at Fuji Electric. In these devices, two stable values of conductance
exist for a single voltage value. Promising applications
include high-density memory devices and driving devices for organic
electroluminescence display panels. High current density is obtained
using a simple structure in which a layer of organic material, developed
by Fuji Electric, is sandwiched between metal electrodes. Moreover, a
high transition voltage of 20V, the highest value achieved in the industry,
has been realized through the development of a new structure
using these materials.
Development of Environmentally Conscious Products
Hirohiko Watanabe, Toshiyuki Kanno, Masaharu Furukawa
The date for compliance with collection and recycling regulations
according to the EU's Waste Electrical and Electronic Equipment
(WEEE) directive and the date on which usage of six materials (lead,
mercury, cadmium, hexavalent chromium, and two types of specially
designated bromine-based fire retardants) is banned according to the
"Restriction of Hazardous Substances" (RoHS) directive have been
decided as August 13, 2005 and July 1, 2006, respectively.
Fuji Electric is actively involved in the development of environmentally
conscious products. Of the materials developed in compliance
with the above regulations, this paper focuses on Fuji Electric's efforts
and describes the material characteristics regarding the two themes of
reactive non-halogen fire-resistant materials for molding resin and
lead-free solder materials for use in lead-free electronic devices.
High-speed Synthesis of Dielectric Thin Film
Materials by Combinatorial Film Deposition
Yoshiyuki Yonezawa, Yoshinori Konishi, Ryosuke Shimizu
Fuji Electric is working on the development of new dielectric thin
films with the prospect of application to integrated thin film capacitors
and oxide thin film devices. In consideration of application to capacitors,
the targeted specification calls for a lead-free material having both
a high dielectric constant (>1,200) and high breakdown voltage (>1
MV/cm). Fuji Electric is working to increase the dielectric constants of
conventional lead-free materials and also to develop SnTiO
3, a new
dielectric material, charge-transfer type dielectric materials, and the
like, but this type of search involving the synthesis and evaluation of
new materials is extremely labor and time intensive. To solve this
problem, combinatorial thin film technology, a high-speed screening
technique said to compress 20 years into three months, has been advocated.
This paper presents an overview of combinatorial thin film technology
and its use at Fuji Electric.
A New Semiconductor Device with Trench Technology
Yoshihiko Nagayasu, Naoto Fujishima, Kunio Mochizuki
By using a trench structure to enable the three-dimensional utilization
of a silicon substrate, Fuji Electric has developed 700V-class
high voltage lateral MOS technology that exhibits the lowest output
on-resistance in the industry. In Fuji Electric's proprietary method for
manufacture, a deep (20
m) stripe-shaped trench having a high aspect
ratio is formed, ions are injected obliquely to create an offset drain
region along the trench, and then an insulating layer is formed by oxidation
and CVD. This method increases the cell density and realizes
the best output on-resistance of 11
mm
2 (device breakdown voltage
of 750V), which is the approximately 30% less than that of a conventional
high voltage MOSFET.
Structural Control Method for Perpendicular Magnetic Recording Film
Shunji Takenoiri, Yasushi Sakai, Sadayuki Watanabe
Development efforts to commercialize perpendicular magnetic
recording film are intensifying. The granular media of CoPtCr-SiO
2 that
Fuji Electric uses as a magnetic layer is a promising high-density
recording media that aims to achieve 200Gbits/in
2. However, in order
to obtain excellent characteristics in a recording medium, the magnetic
crystal grains must be made uniform, miniaturized and magnetically
separated. This paper presents an example in which the size of magnetic
crystal grains and the structure that magnetically separates them
were controlled by controlling the size of Ru crystal grains and the surface
structure in a CoPtCr-SiO
2 medium that uses Ru in the foundation
layer.
Rapid Inspection Technology for Microorganisms
Naohiro Noda, Takamasa Asano, Yujiro Kitaide
In the food, pharmaceutical and many other industries, the capability
to inspect microorganisms rapidly is required. Fuji Electric has
studied the micro-colony technique as a method for quickly and easily
inspecting microorganisms. From the results of the study, we learned
by using the micro-colony technique it is possible to detect contamination
by bacteria that causes food poisoning, heat-resistant bacteria, and
fungi. The time required for detection was much shorter than in the
case of using the conventional culture method, and the type of microorganism
could be determined from the shape of the micro-colony.
Moreover, it is predicted that automated machines will be used in the
future to detect colonies quickly and easily.
Top-emitting CCM-organic Light Emitting Displays
Hiroshi Kimura
A top-emitting device has been developed for CCM-AM-OLED
displays. The fabrication method for the transparent cathodes at the
upper portion of the top-emitting device using opposing-targets sputtering
and the optical design method of the OLED device structure utilizing
optical simulation are introduced. A prototype of the CCM topemitting
device was fabricated by laminating a CCM substrate to a topemitting
device.
Wireless Link Design for Contactless Smart Cards
Shiro Kondo, Tatsuyuki Shikura
Recently, contactless smart card applications have rapidly been
spreading in popularity, and various types of cards and differently
shaped media such as wristbands, watches and cell phones containing
built-in ICs for smart cards are appearing on the market. Hence the
inter-connectivity between such media and reading and writing devices
(RWs) is an important issue. Focusing on the wireless communications
technology for contactless smart cards, this paper describes design
concepts for the data link and physical layers as well as specific examples
of Fuji Electric's development and design methodology.
Recent Optimization Techniques and Applications to Customer Solutions
Shinji Kitagawa, Michio Takenaka, Yoshikazu Fukuyama
This paper introduces recent optimization techniques developed at
Fuji Electric and applications of those techniques to customer solutions.
We have developed optimization techniques that are metaheuristic
techniques and techniques based on the theory of stability of
non-linear systems, and these techniques enable various customer
solutions including a reduction in operating costs, optimization of control
quality, and device miniaturization. Sensor-based diagnosis in a
system for the optimal operation of an energy plant is presented as an
example. Fuji Electric will continue to develop optimization techniques
to realize customer solutions.
High-efficiency Power Conversion with Matrix Converter
Junichi Itoh, Akihiro Odaka, Ikuya Sato
Since a matrix converter directly converts arbitrary AC voltages
from an AC power source, its conversion efficiency is higher than that
of an inverter. Moreover, the matrix converter has the characteristics
of small size and long operating life, and it does not require an electrolytic
capacitor in an intermediate DC stage. Fuji Electric has developed
new technology for commercializing matrix converters and this
paper describes: (1) a reverse blocking IGBT that achieves AC switching
with low loss, (2) protection technology that enables smaller sizes
and higher efficiency, and (3) control technology based on a virtual ACDC-AC
system that simplifies the application of conventional inverter
control.
Welding Technology for Different Steel Materials in a Steam Turbine Rotor
Seiji Imamura, Sakae Izumi, Minoru Iizuka
In high-temperature high-pressure and low-temperature low-pressure
steam turbine rotors, different materials are utilized that have
mechanical properties suitable for the respective conditions of use.
Fuji Electric has developed narrow gap welding technology for different
steel materials to integrate both rotors by welding. A prototype
rotor of actual size was made, first layer welding and multi-layer welding
were implemented, and a series of verification tests such as nondestructive
tests and mechanical properties tests were performed.
Fuji Electric has also developed cladding by welding technology
(technology for welding different types of materials) as a technique for
repairing the grooved part of rotor blades in a geothermal turbine.
Fuji Electric aims to apply this welding technology to single-casing
reheat/non-reheat turbine products and to the repair of geothermal
rotors.
Nano-level Crystal Structure Analyses for
Semiconductor Devices and Magnetic
Recording Media using Synchrotron Radiation
Ryohei Tanuma, Toshikazu Kubo, Michio Ohsawa
Using the industrial-use beamlines that were established at
SPring-8 by a consortium of 13 companies, the microscopic strain
accompanied by Si trench processing and the crystalline structures of
extremely thin film magnetic recording media were analyzed. In the
case of the former, X-rays were expanded with a Fresnel zone plate to
successfully measure strain of 10
-5 with submicron spatial resolution.
For the latter, a grazing incidence X-ray diffraction technique was used
to analyze the crystalline structure of a 0.8nm Ru layer and to detect
the fcc phase in a 20nm hcp magnetic layer. Use of the SPring-8 facilities
enable nano-level analysis of crystalline structures.
Technique for Numerical Simulation of the Etching Process
Kimihisa Kaneko
This paper describes a technique for numerical simulation of the
etching process during semiconductor manufacture. The numerical
analysis utilizes an equation of continuity, the Navier-Stokes equation
and a diffusion equation. Furthermore, the ALE method is applied to
the change in interface shape due to etching of the thin film. A timevarying
profile of an etching cross-section simulated by this technique
was largely in agreement with actual observed results, demonstrating
that this numerical analysis technique can be used effectively to predict
the actual etching form.
3-D Electromagnetic Computation for Zero Phasesequence Current Transformers
Kota Matsumoto, Takahiro Kudo, Hisanobu Asano
Earth leakage circuit breakers are being made smaller and in compliance
with major global standards. Electromagnetic analysis is used in
practical applications as 3D large-scale analysis made possible by the
combination of various developmental methods and the higher performance
of computers. Using the integral element method, we have
applied electromagnetic analysis to zero phase-sequence current transformers
for earth leakage circuit breakers.
The ground fault characteristics, single pole characteristic and
equilibrium characteristic of a 3-pole zero phase-sequence current
transformer were verified by analysis and measurement, and those
results are reported in this paper. Each of the characteristics was
obtained with a level of accuracy sufficient for practical use. In the
future, we plan to apply this technology to the development of 4-pole
devices and to effectively use electromagnetic analysis.
Technology for Simulating Power Electronics Circuit Structures
Satoki Takizawa, Gjini Orges
In the field of power electronics, advances in power semiconductors
and the realization of high-speed switching, in particular, are
enabling power converters to be made smaller and with higher performance.
However, as switching speeds increase, the problems of higher
surge voltages and radiation noise are becoming more conspicuous.
In response to these problems, Fuji Electric is studying ways to
lower surge voltages and radiation noise by analyzing electromagnetic
fields through the simulation of the internal structures of power semiconductor
modules and the simulation of power circuit bus bar structures.
This paper describes examples of those studies.
Optimal Operation of Energy Utility Equipment and
its Application to a Practical System
Donghui Xiang, Tooru Kawamori, Yoshikazu Fukuyama
Various types of energies such as electrical, thermal, steam energies
and compressed air are required in factories, large offices, and hospitals.
These energies are produced by various energy utility equipment
such as cogeneration systems (CGSs), boilers, refrigerators, and
compressors. This paper describes Fuji Electric's unique solution for
total optimal operation of energy utility equipment, and shows an
overview of the technologies utilized in the solution. In addition, a
practical control system of the optimal operation for production facilities,
which has been developed by a Toyota Motor Corporation and Fuji
Electric jointly, is presented.
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