Long-term stable measurement of pressure or differential pressure (flow rate)
Principle of Differential Pressure (Flow) Transmitter
Operating principle

Flow rate is calculated based on the differential pressure generated before/after an orifice plate.
Sensing mechanism

The silicon diaphragm is displaced when pressure is applied from P1 and P2, and the capacitance between the capacitor electrode and the silicon diaphragm changes. This change in capacitance is proportional to the differential pressure.